A Study on Emission Spectral Diagnosis of Ar/CH4 Plasma Jet

LI Zheng-kai; CHEN Lei; YANG Cong; SONG Peng; ZENG Wen; LIU Ai-guo; PANG Jun-yi

doi:10.3964/j.issn.1000-0593(2021)05-1398-06

Journals >Spectroscopy and Spectral Analysis >Volume 41 >Issue 5 >Page 1398 > Article

Spectroscopy and Spectral Analysis
Vol. 41, Issue 5, 1398 (2021)

A Study on Emission Spectral Diagnosis of Ar/CH4 Plasma Jet

LI Zheng-kai^1、*, CHEN Lei¹, YANG Cong¹, SONG Peng^2、3, ZENG Wen¹, LIU Ai-guo¹, and PANG Jun-yi¹

Author Affiliations

¹[in Chinese]

²[in Chinese]

³[in Chinese]

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DOI: 10.3964/j.issn.1000-0593(2021)05-1398-06 Cite this Article

LI Zheng-kai, CHEN Lei, YANG Cong, SONG Peng, ZENG Wen, LIU Ai-guo, PANG Jun-yi. A Study on Emission Spectral Diagnosis of Ar/CH4 Plasma Jet[J]. Spectroscopy and Spectral Analysis, 2021, 41(5): 1398 Copy Citation Text

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References

[1] Xie Q, Lin H F, Zhang S, et al. Plasma Science and Technol., 2018, 20(2): 025504.

[5] Rie K T, Menthe E, Wohle J. Surfacce and Coating Technology, 1998, 98(1-3): 1192.

[6] Srivastava N, Wang C. Plasma Science and Technol., 2019, 21(11): 115401.

[9] Chen L, Ma M W, Li M, et al. Plasma Science and Technol., 2011, 13(6): 689.

LI Zheng-kai, CHEN Lei, YANG Cong, SONG Peng, ZENG Wen, LIU Ai-guo, PANG Jun-yi. A Study on Emission Spectral Diagnosis of Ar/CH4 Plasma Jet[J]. Spectroscopy and Spectral Analysis, 2021, 41(5): 1398

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