Soliton microcomb-assisted microring photonic thermometer with ultra-high resolution and broad range

Cheng Zhang; Jin Wang; Guoguo Kang; Jianxin Gao; Zhier Qu; Shuai Wan; Chunhua Dong; Yijie Pan; Jifeng Qu

doi:10.1364/PRJ.496232

[1] Z. L. Newman, V. Maurice, T. Drake, J. R. Stone, T. C. Briles, D. T. Spencer, C. Fredrick, Q. Li, D. Westly, B. R. Ilic, B. Shen, M.-G. Suh, K. Y. Yang, C. Johnson, D. M. S. Johnson, L. Hollberg, K. J. Vahala, K. Srinivasan, S. A. Diddams, J. Kitching, S. B. Papp, M. T. Hummon. Architecture for the photonic integration of an optical atomic clock. Optica, 6, 680-685(2019).

[2] P. D. D. Schwindt, S. Knappe, V. Shah, L. Hollberg, J. Kitching, L.-A. Liew, J. Moreland. Chip-scale atomic magnetometer. Appl. Phys. Lett., 85, 6409-6411(2004).

[3] S. Dedyulin, Z. Ahmed, G. Machin. Emerging technologies in the field of thermometry. Meas. Sci. Technol., 33, 092001(2022).

[4] A. J. Fleisher, Z. Ahmed, T. Herman, M. R. Hartings. Dual electro-optic frequency comb photonic thermometry. Opt. Lett., 48, 2210-2213(2023).

[5] X. Xu, W. Chen, G. Zhao, Y. Li, C. Lu, L. Yang. Wireless whispering-gallery-mode sensor for thermal sensing and aerial mapping. Light Sci. Appl., 7, 62(2018).

[6] X. Zhang, Y. Yang, H. Bai, J. Wang, M. Yan, H. Xiao, T. Wang. Theoretical aspects and sensing demonstrations of cone-shaped inwall capillary-based microsphere resonators. Photon. Res., 5, 516-520(2017).

[7] M. You, Z. Lin, X. Li, J. Liu. Chip-scale silicon ring resonators for cryogenic temperature sensing. J. Lightwave Technol., 38, 5768-5773(2020).

[8] C. Zhang, G. Kang, Y. Xiong, T. Xu, L. Gu, X. Gan, Y. Pan, J. Qu. Photonic thermometer with a sub-millikelvin resolution and broad temperature range by waveguide-microring Fano resonance. Opt. Express, 28, 12599-12608(2020).

[9] A. K. Mallik, G. Farrell, D. Liu, V. Kavungal, Q. Wu, Y. Semenova. A coated spherical microresonator for measurement of water vapor concentration at PPM levels in very low humidity environments. J. Lightwave Technol., 36, 2667-2674(2018).

[10] T. Xing, E. Xing, T. Jia, J. Li, J. Rong, Y. Zhou, W. Liu, J. Tang, J. Liu. Fast switching acoustic sensor with ultrahigh sensitivity and wide dynamic response range based on ultrahigh-Q CaF₂ resonator. J. Lightwave Technol., 40, 5775-5780(2022).

[11] J. Liao, A. Qavi, M. Adolphson, L. Yang. High-Q WGM resonators encapsulated in PDMS for highly sensitive displacement detection. J. Lightwave Technol., 41, 2862-2869(2023).

[12] V. Kavungal, G. Farrell, Q. Wu, A. K. Mallik, Y. Semenova. A packaged whispering gallery mode strain sensor based on a polymer-wire cylindrical micro resonator. J. Lightwave Technol., 36, 1757-1765(2018).

[13] B. Duan, H. Zou, J.-H. Chen, C. H. Ma, X. Zhao, X. Zheng, C. Wang, L. Liu, D. Yang. High-precision whispering gallery microsensors with ergodic spectra empowered by machine learning. Photon. Res., 10, 2343-2348(2022).

[14] J. Zhu, S. K. Ozdemir, Y.-F. Xiao, L. Li, L. He, D.-R. Chen, L. Yang. On-chip single nanoparticle detection and sizing by mode splitting in an ultrahigh-Q microresonator. Nat. Photonics, 4, 46-49(2010).

[15] L. He, Ş. K. Özdemir, J. Zhu, W. Kim, L. Yang. Detecting single viruses and nanoparticles using whispering gallery microlasers. Nat. Nanotechnol., 6, 428-432(2011).

[16] H. Xu, M. Hafezi, J. Fan, J. M. Taylor, G. F. Strouse, Z. Ahmed. Ultra-sensitive chip-based photonic temperature sensor using ring resonator structures. Opt. Express, 22, 3098-3104(2014).

[17] J. Wang, Y. Pan, J. Gao, C. Zhang, Z. Qu, T. Xu, Y. Shen, J. Qu. An on-chip silicon photonics thermometer with milli-kelvin resolution. Appl. Sci., 12, 3713(2022).

[18] J. Liao, L. Yang. Optical whispering-gallery mode barcodes for high-precision and wide-range temperature measurements. Light Sci. Appl., 10, 32(2021).

[19] S. Zhao, Q. Liu, J. Chen, Z. He. Resonant fiber-optic strain and temperature sensor achieving thermal-noise-limit resolution. Opt. Express, 29, 1870-1878(2021).

[20] X. Zhu, Y. Li, Z. Lin, M. You, J. Liu. Stability of silicon resonator temperature sensors with the Pound–Drever–Hall technique. Opt. Lett., 48, 924-927(2023).

[21] G. Li, L. Ji, G. Li, J. Su, C. Wu. High-resolution and large-dynamic-range temperature sensor using fiber Bragg grating Fabry-Pérot cavity. Opt. Express, 29, 18523-18529(2021).

[22] T. Herr, V. Brasch, J. D. Jost, C. Y. Wang, N. M. Kondratiev, M. L. Gorodetsky, T. J. Kippenberg. Temporal solitons in optical microresonators. Nat. Photonics, 8, 145-152(2014).

[23] Q.-F. Yang, B. Shen, H. Wang, M. Tran, Z. Zhang, K. Y. Yang, L. Wu, C. Bao, J. Bowers, A. Yariv, K. Vahala. Vernier spectrometer using counterpropagating soliton microcombs. Science, 363, 965-968(2019).

[24] R. Niu, M. Li, S. Wan, Y. R. Sun, S.-M. Hu, C.-L. Zou, G.-C. Guo, C.-H. Dong. kHz-precision wavemeter based on reconfigurable microsoliton. Nat. Commun., 14, 169(2023).

[25] Y. Sun, J. Wu, M. Tan, X. Xu, Y. Li, R. Morandotti, A. Mitchell, D. J. Moss. Applications of optical microcombs. Adv. Opt. Photon., 15, 86-175(2023).

[26] B.-B. Li, Q.-Y. Wang, Y.-F. Xiao, X.-F. Jiang, Y. Li, L. Xiao, Q. Gong. On chip, high-sensitivity thermal sensor based on high-Q polydimethylsiloxane-coated microresonator. Appl. Phys. Lett., 96, 251109(2010).

[27] J. Alnis, A. Schliesser, C. Y. Wang, J. Hofer, T. J. Kippenberg, T. W. Hänsch. Thermal-noise-limited crystalline whispering-gallery-mode resonator for laser stabilization. Phys. Rev. A, 84, 011804(2011).

[28] J. D. Swaim, J. Knittel, W. P. Bowen. Detection of nanoparticles with a frequency locked whispering gallery mode microresonator. Appl. Phys. Lett., 102, 183106(2013).

[29] W. Weng, J. D. Anstie, T. M. Stace, G. Campbell, F. N. Baynes, A. N. Luiten. Nano-Kelvin thermometry and temperature control: beyond the thermal noise limit. Phys. Rev. Lett., 112, 160801(2014).

[30] J. Lim, A. A. Savchenkov, E. Dale, W. Liang, D. Eliyahu, V. Ilchenko, A. B. Matsko, L. Maleki, C. W. Wong. Chasing the thermodynamical noise limit in whispering-gallery-mode resonators for ultrastable laser frequency stabilization. Nat. Commun., 8, 8(2017).

[31] S. Fujii, T. Tanabe. Dispersion engineering and measurement of whispering gallery mode microresonator for Kerr frequency comb generation. Nanophotonics, 9, 1087-1104(2020).

[32] C. Zhang, G. Kang, J. Wang, Y. Pan, J. Qu. Inverse design of soliton microcomb based on genetic algorithm and deep learning. Opt. Express, 30, 44395-44407(2022).

[33] K.-N. Joo, S.-W. Kim. Absolute distance measurement by dispersive interferometry using a femtosecond pulse laser. Opt. Express, 14, 5954-5960(2006).

[34] S. Wan, R. Niu, J.-L. Peng, J. Li, G.-C. Guo, C.-L. Zou, C.-H. Dong. Fabrication of the high-Q Si₃N₄ microresonators for soliton microcombs. Chin. Opt. Lett., 20, 032201(2022).

[35] C. Zhang, G.-G. Kang, J. Wang, S. Wan, C.-H. Dong, Y.-J. Pan, J.-F. Qu. Photonic thermometer by silicon nitride microring resonator with milli-kelvin self-heating effect. Measurement, 188, 110494(2022).

[36] Z. Qu, X. Liu, C. Zhang, J. Wang, Y. Wang, Y. Pan, J. Qu. Fabrication of an ultra-high quality MgF₂ micro-resonator for a single soliton comb generation. Opt. Express, 31, 3005-3016(2023).

[37] J. I. Thorpe, K. Numata, J. Livas. Laser frequency stabilization and control through offset sideband locking to optical cavities. Opt. Express, 16, 15980-15990(2008).

[38] H. Weng, J. Liu, A. A. Afridi, J. Li, J. Dai, X. Ma, Y. Zhang, Q. Lu, J. F. Donegan, W. Guo. Directly accessing octave-spanning dissipative Kerr soliton frequency combs in an AlN microresonator. Photon. Res., 9, 1351-1357(2021).

[39] F. Lei, Z. Ye, V. Torres-Company. Thermal noise reduction in soliton microcombs via laser self-cooling. Opt. Lett., 47, 513-516(2022).

[40] L. Stern, A. Naiman, G. Keinan, N. Mazurski, M. Grajower, U. Levy. Ultra-precise optical to radio frequency based chip-scale refractive index and temperature sensor. Optica, 4, 1-7(2017).

[41] J. Komma, C. Schwarz, G. Hofmann, D. Heinert, R. Nawrodt. Thermo-optic coefficient of silicon at 1550 nm and cryogenic temperatures. Appl. Phys. Lett., 101, 041905(2012).

[42] A. W. Elshaari, I. E. Zadeh, K. D. Jons, V. Zwiller. Thermo-optic characterization of silicon nitride resonators for cryogenic photonic circuits. IEEE Photon. J., 8, 2701009(2016).

[43] C. Xiang, J. Liu, J. Guo, L. Chang, R. N. Wang, W. Weng, J. Peters, W. Xie, Z. Zhang, J. Riemensberger, J. Selvidge, T. J. Kippenberg, J. E. Bowers. Laser soliton microcombs on silicon. Science, 373, 99-103(2021).

[44] H. Arianfard, S. Juodkazis, D. J. Moss, J. Wu. Sagnac interference in integrated photonics. Appl. Phys. Rev., 10, 011309(2023).

[45] H. Zhang, C. Jiang, X. Zhu, J. Hu, P. Wang, H. Li, S. Sun, T. Cao. High-sensitivity transverse-load and axial-strain sensor based on air-bubble Fabry–Pérot cavity and fiber Sagnac loop cascaded. IEEE Sens. J., 23, 5795-5802(2023).

[46] G.-D. Kim, H.-S. Lee, C.-H. Park, S.-S. Lee, B. T. Lim, H. K. Bae, W.-G. Lee. Silicon photonic temperature sensor employing a ring resonator manufactured using a standard CMOS process. Opt. Express, 18, 22215-22221(2010).