ZHAO Zhi-juan, LIU Fen, WANG Hai, ZHAO Liang-zhong, YAN Shou-ke, SONG Xiao-ping. Thickness Measurement of Ultrathin SiO2 Layer on Si by Using XPS Standard Curve[J]. Spectroscopy and Spectral Analysis, 2010, 30(6): 1670
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- Spectroscopy and Spectral Analysis
- Vol. 30, Issue 6, 1670 (2010)
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