Plasma-Enhanced Atomic Layer Deposition of GaN Thin Films on GaAs Substrate

QIU Hongyu; WANG Xinyi; DUAN Zhang; QIU Peng; LIU Heng; ZHU Xiaoli; TIAN Feng; WEI Huiyun; ZHENG Xinhe

doi:10.16818/j.issn1001-5868.2023031501

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