• Optical Instruments
  • Vol. 45, Issue 4, 9 (2023)
Haiquan TONG and Guanjun YOU*
Author Affiliations
  • School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China
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    DOI: 10.3969/j.issn.1005-5630.2023.004.002 Cite this Article
    Haiquan TONG, Guanjun YOU. Research on Terahertz near-field optical subsurface detection technology[J]. Optical Instruments, 2023, 45(4): 9 Copy Citation Text show less

    Abstract

    This paper investigated the microscopic imaging and detection of subsurface metal micro/nano structures using Terahertz scattering-type near-field optical microscopy (THz s-SNOM). For the first time, a self-built THz s-SNOM system was employed to measure the Terahertz near-field of gold micro wires covered with hexagonal boron nitride (h-BN) film on the surface, resulting in near-field microscopy images with nanometer-level spatial resolution and high contrast. Combined with full-wave numerical simulation, the spatial resolution, near-field scattering signal intensity, and imaging contrast of THz s-SNOM for detecting subsurface metal micro/nano structures were analyzed. The study shows that THz s-SNOM has excellent subsurface microscopic imaging and detection capabilities and can be applied to the subsurface structure characterization and defect detection of micro/nano electronic devices.
    Haiquan TONG, Guanjun YOU. Research on Terahertz near-field optical subsurface detection technology[J]. Optical Instruments, 2023, 45(4): 9
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