Fabrication and Testing of MEMS Velocity Sensor Based on Self-Heating Amorphous Germanium Thermistors

ZHAO Weiliang; CUI Feng

doi:10.16818/j.issn1001-5868.2023010202

Journals >Semiconductor Optoelectronics >Volume 44 >Issue 2 >Page 175 > Article

Semiconductor Optoelectronics
Vol. 44, Issue 2, 175 (2023)

Fabrication and Testing of MEMS Velocity Sensor Based on Self-Heating Amorphous Germanium Thermistors

ZHAO Weiliang and CUI Feng

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[in Chinese]

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DOI: 10.16818/j.issn1001-5868.2023010202 Cite this Article

ZHAO Weiliang, CUI Feng. Fabrication and Testing of MEMS Velocity Sensor Based on Self-Heating Amorphous Germanium Thermistors[J]. Semiconductor Optoelectronics, 2023, 44(2): 175 Copy Citation Text

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References

[1] Kuo J T W, Yu L, Meng E. Micromachined thermal flow sensors—A review[J]. Micromachines, 2012, 3(3): 550-573.

[4] Cerimovic S, Talic A, Beigelbeck R. Bidirectional micromachined flow sensor featuring a hot film made of amorphous germanium[J]. Measurement Science and Technology, 2013, 24(8): 084002.

[5] Yarali M, Khanna S K. Microfabrication of a variable range and multi-directionally sensitive thermal flow sensor[J]. Sensors and Actuators A: Physical, 2014, 220: 159-167.

[6] Kohl F, Beigelbeck R, Loschmidt P. FEM-based analysis of micromachined calorimetric flow sensors[C]// IEEE, Sensors, 2006: 1215-1218.

[7] Talic A, Cerimovic S, Beigelbeck R. FEM-analysis of 2D micromachined flow transduers based on aGe-thermistor arrays and a double bridge readout[J]. Sensors (Basel), 2019, 19(16): 3561.

ZHAO Weiliang, CUI Feng. Fabrication and Testing of MEMS Velocity Sensor Based on Self-Heating Amorphous Germanium Thermistors[J]. Semiconductor Optoelectronics, 2023, 44(2): 175

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