• Semiconductor Optoelectronics
  • Vol. 44, Issue 2, 175 (2023)
ZHAO Weiliang and CUI Feng
Author Affiliations
  • [in Chinese]
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    DOI: 10.16818/j.issn1001-5868.2023010202 Cite this Article
    ZHAO Weiliang, CUI Feng. Fabrication and Testing of MEMS Velocity Sensor Based on Self-Heating Amorphous Germanium Thermistors[J]. Semiconductor Optoelectronics, 2023, 44(2): 175 Copy Citation Text show less
    References

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    [4] Cerimovic S, Talic A, Beigelbeck R. Bidirectional micromachined flow sensor featuring a hot film made of amorphous germanium[J]. Measurement Science and Technology, 2013, 24(8): 084002.

    [5] Yarali M, Khanna S K. Microfabrication of a variable range and multi-directionally sensitive thermal flow sensor[J]. Sensors and Actuators A: Physical, 2014, 220: 159-167.

    [6] Kohl F, Beigelbeck R, Loschmidt P. FEM-based analysis of micromachined calorimetric flow sensors[C]// IEEE, Sensors, 2006: 1215-1218.

    [7] Talic A, Cerimovic S, Beigelbeck R. FEM-analysis of 2D micromachined flow transduers based on aGe-thermistor arrays and a double bridge readout[J]. Sensors (Basel), 2019, 19(16): 3561.

    ZHAO Weiliang, CUI Feng. Fabrication and Testing of MEMS Velocity Sensor Based on Self-Heating Amorphous Germanium Thermistors[J]. Semiconductor Optoelectronics, 2023, 44(2): 175
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