Preparation of Epitaxial Metallic LaNiO3 Thin Film by Polymer Assisted Deposition

Zhu YANG; Shaobo GUO; Henghui CAI; Xianlin DONG; Genshui WANG

doi:10.15541/jim20210271

Journals >Journal of Inorganic Materials >Volume 37 >Issue 5 >Page 561 > Article

Journal of Inorganic Materials
Vol. 37, Issue 5, 561 (2022)

Preparation of Epitaxial Metallic LaNiO₃ Thin Film by Polymer Assisted Deposition

Zhu YANG^1、2, Shaobo GUO^1、*, Henghui CAI^1、2, Xianlin DONG^1、2、3, and Genshui WANG^{1、2、3、*}

Author Affiliations

¹1. Key Laboratory of Inorganic Functional Materials and Devices, Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 200050, China

²2. Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China

³3. State Key Laboratory of High Performance Ceramics and Superfine Microstructure, Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 200050, China

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DOI: 10.15541/jim20210271 Cite this Article

Zhu YANG, Shaobo GUO, Henghui CAI, Xianlin DONG, Genshui WANG. Preparation of Epitaxial Metallic LaNiO₃ Thin Film by Polymer Assisted Deposition[J]. Journal of Inorganic Materials, 2022, 37(5): 561 Copy Citation Text

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Charaterization of as-prepared LNO film(a) HRXRD patterns of the LNO films; (b) Rocking-curve of the (002) LNO reflection; (c) φ-scans from (202) reflection of LNO and (202) of STO; (d) 3D AFM micrograph of LNO film; (e) Bright-field cross-sectional TEM image of LNO film on STO substrate; (f) Cross-sectional HRTEM image of the interface between LNO and STO

1. Charaterization of as-prepared LNO film(a) HRXRD patterns of the LNO films; (b) Rocking-curve of the (002) LNO reflection; (c) φ-scans from (202) reflection of LNO and (202) of STO; (d) 3D AFM micrograph of LNO film; (e) Bright-field cross-sectional TEM image of LNO film on STO substrate; (f) Cross-sectional HRTEM image of the interface between LNO and STO

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2. In-situ XRD patterns of LNO film on STO substrate at different temperatures

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3. Survey (a), La3d (b), Ni2p (c) and O1s (d) XPS spectra of LaNiO₃

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4. Temperature dependence of resistivity of 25 nm LNO film on STO substrate

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Method	Substrate	Orientation	d/nm	ρ_{300 K}/ (μΩ·cm)	Ref.
SCD	SrTiO₃	Preferred orientation	100	340	[31]
RF-MS	LaAlO₃	Epitaxial	9	~150	[28]
MBE	SrTiO₃	Epitaxial	36	~90	[29]
PLD	SrTiO₃	Epitaxial	50-60	100	[30]
PAD	SrTiO₃	Epitaxial	25	160	This work

Table 1.

Summary of the parameters of LNO films grown by different methods

Zhu YANG, Shaobo GUO, Henghui CAI, Xianlin DONG, Genshui WANG. Preparation of Epitaxial Metallic LaNiO₃ Thin Film by Polymer Assisted Deposition[J]. Journal of Inorganic Materials, 2022, 37(5): 561

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