Investigation on laser doping and annealing of silicon strips

Sun Jintan; Cheng Guowen; Zhang Guangrong; Wang Heqing; Wang Aiping; Zhang Changlin

Journals >Chinese Journal of Lasers >Volume 9 >Issue 5 >Page 83 > Article

Chinese Journal of Lasers
Vol. 9, Issue 5, 83 (1982)

Investigation on laser doping and annealing of silicon strips

Sun Jintan, Cheng Guowen, Zhang Guangrong, Wang Heqing, Wang Aiping, and Zhang Changlin

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[in Chinese]

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Sun Jintan, Cheng Guowen, Zhang Guangrong, Wang Heqing, Wang Aiping, Zhang Changlin. Investigation on laser doping and annealing of silicon strips[J]. Chinese Journal of Lasers, 1982, 9(5): 83 Copy Citation Text

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Abstract

Sun Jintan, Cheng Guowen, Zhang Guangrong, Wang Heqing, Wang Aiping, Zhang Changlin. Investigation on laser doping and annealing of silicon strips[J]. Chinese Journal of Lasers, 1982, 9(5): 83

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