Author Affiliations
1College of Optical Science and Engineering, Zhejiang University, Hangzhou 310027, China2State Key Laboratory of Extreme Photonics and Instrumentation, Zhejiang University, Hangzhou 310027, China3ASMPT Hong Kong Limited, Hong Kong SAR 999077, Chinashow less
Fig. 1. Asymmetric perturbation model
Fig. 2. Axial perturbation model
Fig. 3. Workflow of tolerance sensitivity reduction
Fig. 4. Layout of Structure 1
Fig. 5. Distribution of eigenvalues
Fig. 6. Zernike coefficients distribution of main eigenvectors
Fig. 7. Weight distribution of induced aberrations in Structure 1
Fig. 8. Distribution of induced coma on different surfaces
Fig. 9. MTF performance before and after optimization of Structure 1 (>98% MTF@36 lp/mm)
Fig. 10. Layout of Structure 2
Fig. 11. Weight distribution of induced aberrations in Structure 2
Fig. 12. Distribution of induced axial aberration on different surfaces
Fig. 13. MTF performance of Structure 2 (>90% MTF@180 lp/mm)
Induced aberration | Mathematical expression | Tilt | $ {W}_{111}\left(\overrightarrow{\sigma }\cdot \overrightarrow{\rho }\right)={W}_{111}\sigma \rho \mathrm{c}\mathrm{o}\mathrm{s}\theta $ | Uniform coma | $ {W}_{131}(\overrightarrow{\sigma }\cdot \overrightarrow{\rho })(\overrightarrow{\rho }\cdot \overrightarrow{\rho })={W}_{131}\sigma {\rho }^{3}\mathrm{c}\mathrm{o}\mathrm{s}\theta $ | Linear astigmatism | $ {W}_{222}(\overrightarrow{\sigma }\cdot \overrightarrow{\rho })(\overrightarrow{H}\cdot \overrightarrow{\rho })={W}_{222}\sigma H{\rho }^{2}{\mathrm{c}\mathrm{o}\mathrm{s}}^{2}\theta $ | Uniform astigmatism | $ {W}_{222}(\overrightarrow{\sigma }\cdot \overrightarrow{\rho })(\overrightarrow{\sigma }\cdot \overrightarrow{\rho })={W}_{222}{\sigma }^{2}{\rho }^{2}{\mathrm{c}\mathrm{o}\mathrm{s}}^{2}\theta $ |
|
Table 1. Several types of induced aberration
Parameter | Value | Working F# | 11 | Magnification | 1.35× | EFL/mm | 94 | Wavelength/nm | 460-635 |
|
Table 2. System parameters of Structure 1
Parameter | Value | Thickness | ±0.02 mm | Surface radius | ±3 fringes | Surface tilt | ±1' | Element decenter | ±0.015 mm | Element tilt | ±1' | | | Nominal | Mean | Standard deviation | Original | 0.701 | 0.347 | 0.120 | Optimized | 0.687 | 0.505 | 0.082 |
|
Table 3. Tolerance setting and performance of Structure 1 (36 lp/mm@ MTF, on-axis)
Parameter | Value | NA | 0.5 | Magnification | 5× | Total length/mm | 110 | Wavelength/nm | 460-635 |
|
Table 4. System parameters of Structure 2
Parameter | Value | Thickness | ±0.01 mm | Surface radius | ±1 fringes | Surface tilt | ±1' | Element decenter | ±0.01 mm | Element tilt | ±1' | | | Nominal | Mean | Standard deviation | Original | 0.345 | 0.243 | 0.075 | Optimized | 0.327 | 0.272 | 0.066 |
|
Table 5. Tolerance setting and nominal performance of Structure 2 (180 lp/mm@ MTF, on-axis)