• Semiconductor Optoelectronics
  • Vol. 43, Issue 6, 1092 (2022)
WU Qiang1, GUAN Weichang2, DAI Xuhan1, WANG Huaizhi1, GAO Yufan1, and DING Guifu1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: 10.16818/j.issn1001-5868.2022112101 Cite this Article
    WU Qiang, GUAN Weichang, DAI Xuhan, WANG Huaizhi, GAO Yufan, DING Guifu. Study of Planar Electromagnetic Linear Actuators with Integrated Manufacturing[J]. Semiconductor Optoelectronics, 2022, 43(6): 1092 Copy Citation Text show less

    Abstract

    The electromagnetic actuator has a wide application prospect in communication, automatic testing, and power electronics due to its high output force, long stroke, and no contact, but it is difficult to meet the development demand of miniaturization and integration of electronic systems in related fields due to its large size and complicated manufacturing process. To address the above problems, a prototype of miniaturized electromagnetic actuator was designed and manufactured by applying planar integrated coils and high aspect ratio microstructure. Preliminary test results show that the output force of the device can reach the mN level, the output displacement is greater than 50μm, and the response time is less than 10ms, which indicates a feasible technical path for further research on the device.
    WU Qiang, GUAN Weichang, DAI Xuhan, WANG Huaizhi, GAO Yufan, DING Guifu. Study of Planar Electromagnetic Linear Actuators with Integrated Manufacturing[J]. Semiconductor Optoelectronics, 2022, 43(6): 1092
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