• Optical Instruments
  • Vol. 45, Issue 5, 79 (2023)
Zhe ZHANG1, Mingyu LI1、2、*, Zehua XIAO1, Lun PAN2, Sheng BAO1, Zhiping YANG3, and Qiushun LI4
Author Affiliations
  • 1College of Optoelectronic Engineering, Changchun University of Science and Technology, Changchun 130022, China
  • 2Zhejiang LightTip Electronic Technology Co., LTD., Wenzhou 325011, China
  • 3State Key Laboratory of Modern Optical Instrumentation, Zhejiang University, Hangzhou, 310027, China
  • 4Biology Institute, Qilu University of Technology (Shandong Academy of Sciences), Jinan 250103, China
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    DOI: 10.3969/j.issn.1005-5630.2023.005.010 Cite this Article
    Zhe ZHANG, Mingyu LI, Zehua XIAO, Lun PAN, Sheng BAO, Zhiping YANG, Qiushun LI. The chip of temperature sensor based on spatial optical coupling system[J]. Optical Instruments, 2023, 45(5): 79 Copy Citation Text show less

    Abstract

    A silicon photonic chip space coupling system is studied, which simplifies the coupling mode of integrated photonic chip with optical fiber array, Through the spatial optical system, the light in the band near 1550 nm is vertically coupled into the integrated photonic chip through the grating coupler, and the optical sensing is realized through the waveguide and microring resonator. The multi-mode optical fiber is used to collect the emerging energy and carry out the temperature sensing test. The experimental results show that the transmission lines of the through-end ring resonator with frree spectral range(FSR) of 0.85 nm and Q value of 16321 are obtained by wavelength detection. In temperature sensing tests, the sensitivity reached 127 pm/℃. The results show that there is only a difference between spatial optical coupling and optical fiber array optical coupling in insertion loss, and the coupling system can get better temperature sensing test results. Spatial optical coupling has the advantages of convenient replacement of sensor chip and easy to multi-channel testing.
    Zhe ZHANG, Mingyu LI, Zehua XIAO, Lun PAN, Sheng BAO, Zhiping YANG, Qiushun LI. The chip of temperature sensor based on spatial optical coupling system[J]. Optical Instruments, 2023, 45(5): 79
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