In the process of laser frequency scanning interferometry ranging, the target vibration introduces Doppler shift in the ranging interference signals which results in the spectral broadening of the signal and the amplification effect of ranging errors. To reduce the effect of vibration on ranging results, we proposed a ranging error compensation method based on laser self-mixing vibration measurement. This method compensates the phase modulation of the target vibration on the ranging interference signal by synchronously measuring the phase change of the self-mixing interference signal, and meanwhile the frequency resampling method is used to correct the laser frequency modulation nonlinearity. Finally, the feasibility of the proposed method is verified by simulation and experiment. In the experiment, when the measured target amplitude was 7102.1 nm, the measured vibration standard deviation was 7.9 nm, the range measurement standard deviation before compensation was 3270.6 μm, and the range measurement standard deviation after compensation was reduced to 21.4 μm,which was close to the case of no vibration, indicating that the amplification problem of ranging errors caused by target vibration was effectively solved.