• Semiconductor Optoelectronics
  • Vol. 43, Issue 3, 547 (2022)
XU Daorun*, LIU Yeqi, YUAN Anbo, LIAO Naiman, QU Pengcheng, LUO Chunlin, and ZHANG Xiaoqin
Author Affiliations
  • [in Chinese]
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    DOI: 10.16818/j.issn1001-5868.2022022601 Cite this Article
    XU Daorun, LIU Yeqi, YUAN Anbo, LIAO Naiman, QU Pengcheng, LUO Chunlin, ZHANG Xiaoqin. Design and Fabrication of Four Spectral TDICCD Image Sensor[J]. Semiconductor Optoelectronics, 2022, 43(3): 547 Copy Citation Text show less

    Abstract

    A kind of four spectral timedelayintegrated charge coupled device (TDI CCD) is designed and fabricated by integrating four TDICCDs on one chip. Different narrowband filter films are plated on the corresponding positions of the light window to realize multiband light splitting. For the designed TDICCD, its pixel size is 28μm×28μm, the horizontal pixel size is 3072 elements, the line frequency is 10kHz, the charge transfer efficiency is 0.99999, the saturation output voltage is 2650mV, the antiblooming ability is more than 100×, and the dynamic range is 7143∶1.
    XU Daorun, LIU Yeqi, YUAN Anbo, LIAO Naiman, QU Pengcheng, LUO Chunlin, ZHANG Xiaoqin. Design and Fabrication of Four Spectral TDICCD Image Sensor[J]. Semiconductor Optoelectronics, 2022, 43(3): 547
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