Pulsed laser ablation in liquid (PLAL) has attracted significant interest in the academic community for its remarkable characteristics of environment protection, wide application range and capable for composite material preparation. But the relative lower preparation rate of PLAL prevents it from further development. Silicon nanostructures with lattice (400~800 nm) and spherical (100~300 nm) patterns on microfluidic chip with promoted production rate is achieved by combining microfluidic technology and PLAL. The morphology structure and distribution are characterized by scanning electron microscope and spectrometer. The relationships between preparation rate of nanoparticles and microfluidic flow velocity as well as laser ablation power are obtained. The maximum preparation rate of PLAL enhances by 30%, up to 87.5 mg/min by the proposed method. Which provides a new technique route of PLAL industrial production.