• High Power Laser and Particle Beams
  • Vol. 33, Issue 4, 041001 (2021)
Xibing Chen1、2, Xiaodong Jiang2、*, Linhong Cao1, Yajun Fu1, Hongwei Yan2, and Lianghong Yan2
Author Affiliations
  • 1Southwest University of Science and Technology, Mianyang 621010, China
  • 2Laser Fusion Research Center, CAEP, Mianyang 621900, China
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    DOI: 10.11884/HPLPB202133.200317 Cite this Article
    Xibing Chen, Xiaodong Jiang, Linhong Cao, Yajun Fu, Hongwei Yan, Lianghong Yan. Influence of ammonia-hexamethyldisilazane on environmental stability of SiO2 chemical film[J]. High Power Laser and Particle Beams, 2021, 33(4): 041001 Copy Citation Text show less
    [in Chinese]
    Fig. 1. [in Chinese]
    [in Chinese]
    Fig. 2. [in Chinese]
    [in Chinese]
    Fig. 3. [in Chinese]
    [in Chinese]
    Fig. 4. [in Chinese]
    [in Chinese]
    Fig. 5. [in Chinese]
    [in Chinese]
    Fig. 6. [in Chinese]
    ammonia-HMDS/mLT/mm relative shrinkage/%n
    before modificationafter modificationbefore modificationafter modification
    5/580.8170.4612.801.19111.2021
    10/1080.6169.3713.941.19141.2023
    15/1580.6768.8614.631.19131.2025
    30/3080.3468.3114.971.19081.2029
    50/5080.0768.6614.251.19021.2029
    Table 1. [in Chinese]
    porosity samplePrelative change
    before modificationafter modification
    b0.6300.6060.024
    c0.6290.6050.024
    d0.6300.6050.025
    e0.6310.6060.025
    f0.6310.6020.029
    Table 2. [in Chinese]
    Xibing Chen, Xiaodong Jiang, Linhong Cao, Yajun Fu, Hongwei Yan, Lianghong Yan. Influence of ammonia-hexamethyldisilazane on environmental stability of SiO2 chemical film[J]. High Power Laser and Particle Beams, 2021, 33(4): 041001
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