• Semiconductor Optoelectronics
  • Vol. 43, Issue 6, 1040 (2022)
CAI Weiming1, REN Qingying1、2, JIANG Yanhu1, WEI Hongfei1, PENG Junyue1, CHANG Chunyun2, and XUE Mei1、2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: 10.16818/j.issn1001-5868.2022111903 Cite this Article
    CAI Weiming, REN Qingying, JIANG Yanhu, WEI Hongfei, PENG Junyue, CHANG Chunyun, XUE Mei. Advances in the Research on MOEMS Gas Sensing Technology[J]. Semiconductor Optoelectronics, 2022, 43(6): 1040 Copy Citation Text show less

    Abstract

    MOEMS gas sensing technology is an innovative technological solution for optical gas sensing techniques combined with MOEMS technology and new materials. MOEMS gas sensor has many advantages such as lower cost, higher integration, stronger anti-interference, higher test accuracy and so on. Firstly, the structure and working principle of primary optical gas sensing systems were introduced. Subsequently, the latest achievements, microoptical devices and microoptical system in MOEMS gas sensing technology were introduced. Taking the current research status of the MOEMS gas sensing devices as clue, challenges and priorities of MOEMS gas sensor were discussed.
    CAI Weiming, REN Qingying, JIANG Yanhu, WEI Hongfei, PENG Junyue, CHANG Chunyun, XUE Mei. Advances in the Research on MOEMS Gas Sensing Technology[J]. Semiconductor Optoelectronics, 2022, 43(6): 1040
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