[1] Nishizawa K, Oikawa M. Micro-optics research activities in Japan[J]. Proceedings of SPIE, 1751, 54-65(1993).
[2] Suleski T J, Kolste R D T. Fabrication trends for free-space microoptics[J]. Journal of Lightwave Technology, 23, 633-646(2005).
[3] Liu T, Liu Z Q, Ye M. Direct imaging with liquid crystal microlens array[J]. Laser & Optoelectronics Progress, 60, 1911001(2023).
[4] Chang S I, Yoon J B, Kim H et al. Microlens array diffuser for a light-emitting diode backlight system[J]. Optics Letters, 31, 3016-3018(2006).
[5] Moulé A J, Meerholz K. Interference method for the determination of the complex refractive index of thin polymer layers[J]. Applied Physics Letters, 91, 061901(2007).
[6] Li J J, Chu C Y, Lu W T et al. Development of microlens arrays: from fabrication to photonic applications[J]. Acta Optica Sinica, 41, 2100001(2021).
[7] Floreano D, Pericet-Camara R, Viollet S et al. Miniature curved artificial compound eyes[J]. Proceedings of the National Academy of Sciences of the United States of America, 110, 9267-9272(2013).
[8] Ma M C, Guo F, Cao Z L et al. Development of an artificial compound eye system for three-dimensional object detection[J]. Applied Optics, 53, 1166-1172(2014).
[9] Shi C Y, Wang Y Y, Liu C Y et al. SCECam: a spherical compound eye camera for fast location and recognition of objects at a large field of view[J]. Optics Express, 25, 32333-32345(2017).
[10] Marcinkevičius A, Juodkazis S, Watanabe M et al. Femtosecond laser-assisted three-dimensional microfabrication in silica[J]. Optics Letters, 26, 277-279(2001).
[11] Zhou T F, Xie J Q, Liang Z Q et al. Advances and prospects of molding for optical microlens array[J]. Chinese Optics, 10, 603-618, 703(2017).
[12] Yi A Y, Li L. Design and fabrication of a microlens array by use of a slow tool servo[J]. Optics Letters, 30, 1707-1709(2005).
[13] Wang L, Luo Y, Liu Z Z et al. Fabrication of microlens array with controllable high NA and tailored optical characteristics using confined ink-jetting[J]. Applied Surface Science, 442, 417-422(2018).
[14] Wu M N, Li X W, Xiang Z K et al. Machining of micro-optical elements using electrons dynamics controlled temporally/spatially shaped femtosecond laser[J]. Chinese Journal of Lasers, 49, 1002501(2022).
[15] Yang X, Sun H L, Yue D M et al. Research progress of femtosecond laser fabrication of microlens array[J]. Laser & Optoelectronics Progress, 58, 0500005(2021).
[16] Wang S X, Feng D, Hu C X et al. The simple two-step polydimethylsiloxane transferring process for high aspect ratio microstructures[J]. Journal of Semiconductors, 39, 086001(2018).