• Semiconductor Optoelectronics
  • Vol. 42, Issue 1, 35 (2021)
ZHANG Haoyue1、2, LI Hong1、2, MENG Fanyong3、4, XU Tao3、4, and ZHU Lianqing1、2、*
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
  • 4[in Chinese]
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    DOI: 10.16818/j.issn1001-5868.2021.01.006 Cite this Article
    ZHANG Haoyue, LI Hong, MENG Fanyong, XU Tao, ZHU Lianqing. Study on Fabrication of Fiber F-P Pressure Sensor by CO2 Laser Melting Capillary End Face[J]. Semiconductor Optoelectronics, 2021, 42(1): 35 Copy Citation Text show less

    Abstract

    A method for fabricating optical fiber Fabry-Perot (FP) pressure sensor by using CO2 laser to melt capillary end face is proposed. The F-P structure is composed of ordinary single-mode fiber (SMF) and a silicon film prepared based on the end face of a CO2 laser fusion capillary. In this paper, the manufacturing process and melting parameters of the silicon thin film are introduced in detail and performance tests are performed on the F-P pressure sensor. The results show that the fabricated fiber F-P sensor realizes good sensitivity and linearity to the pressure, obtaining a sensitivity of 16.37pm/kPa, and the linearity of 0.998.
    ZHANG Haoyue, LI Hong, MENG Fanyong, XU Tao, ZHU Lianqing. Study on Fabrication of Fiber F-P Pressure Sensor by CO2 Laser Melting Capillary End Face[J]. Semiconductor Optoelectronics, 2021, 42(1): 35
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