The dynamical diffraction theory is employed to analyze the diffraction efficiency and the resolution ratio of hard X-ray waves inside the multilayer Laue lenses. The multilayer Laue lenses are made from NbC/Si with a zone thickness of 40 μm. There are two ways to improve the resolution ratio. The first way is to reduce the outmost zone thickness and use wedge structure, but it is hard to form the structure. The second way is to use the high order. This way can improve the resolution ratio without changing the structure. The results show that a focused beam size of 6.72 nm and a mean efficiency of 49.31% can be obtained by the -3rd order of multilayer Laue lens with 10 keV X-ray.