Study on excimer laser for obtaining high output

Ouyang Bin; M. Steyer; K. Stankov

Journals >Chinese Journal of Lasers >Volume 17 >Issue s1 >Page 16 > Article

Chinese Journal of Lasers
Vol. 17, Issue s1, 16 (1990)

Study on excimer laser for obtaining high output

Ouyang Bin¹, M. Steyer², and K. Stankov³

Author Affiliations

¹[in Chinese]

²[in Chinese]

³[in Chinese]

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Ouyang Bin, M. Steyer, K. Stankov. Study on excimer laser for obtaining high output[J]. Chinese Journal of Lasers, 1990, 17(s1): 16 Copy Citation Text

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Abstract

An excimer laser with high output in effective volume is described and the key techniques for obtaining high output are studied.

Keywords

dose inversion circuits preionization speed-up capacitors

Ouyang Bin, M. Steyer, K. Stankov. Study on excimer laser for obtaining high output[J]. Chinese Journal of Lasers, 1990, 17(s1): 16

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