An Investigation of the KrF Excimer Emission spectrum without an Additional Fluorine Donor

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Journals >Chinese Journal of Lasers >Volume 26 >Issue 3 >Page 197 > Article

Chinese Journal of Lasers
Vol. 26, Issue 3, 197 (1999)

An Investigation of the KrF Excimer Emission spectrum without an Additional Fluorine Donor

[in Chinese]¹, [in Chinese]², [in Chinese]², and [in Chinese]²

Author Affiliations

¹[in Chinese]

²[in Chinese]

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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. An Investigation of the KrF Excimer Emission spectrum without an Additional Fluorine Donor[J]. Chinese Journal of Lasers, 1999, 26(3): 197 Copy Citation Text

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Abstract

Without an additional fluorine donor, the Kr/Ne mixture was excited in an excimer laser with teflon surface preionization plates. The relative UV spectrum was analyzed by ways of spectrography and opto electric scanning. The formation of KrF excimer was affirmed. The relations of emission spectrum with parameters were studied.

Keywords

KrF excimer emission spectrum teflon surface preionization plate without additional fluorine donor

[in Chinese], [in Chinese], [in Chinese], [in Chinese]. An Investigation of the KrF Excimer Emission spectrum without an Additional Fluorine Donor[J]. Chinese Journal of Lasers, 1999, 26(3): 197

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