Antireflection film with a narrow range of angle of incidence (AOI), antireflection film with a wide range of AOI, and multilayer high reflection thin film at 193nm were designed respectively. The maximum deviations of the s and p polarized light transmittances of the antireflection film were 0.17% and 0.44%, respectively. Combining the scalar scattering theory and the equivalent absorption layer approximation theory, the rough interface between the multilayer film was equivalent to a thin absorption layer, and the spectral properties at different interface roughness were analyzed based on the thin film intrinsic transfer matrix. The results show that the spectral performance of the optical thin film decrease with the increase of the root mean square roughness of the interface and the reflection bandwidth of the high reflection film also decrease. When the root mean square roughness reaches 4nm, the spectral performance of the antireflection film with a wide range of AOI and the multilayer high reflection film degrade by 2.04% and 2.09%, respectively. Interface roughness is the key factor affecting the preparation of VUV optical thin film with high spectral properties.