• Frontiers of Optoelectronics
  • Vol. 3, Issue 4, 376 (2010)
Saeed OLYAEE*, Samaneh HAMEDI, and Zahra DASHTBAN
Author Affiliations
  • Nano-Photonics and Optoelectronics Research Laboratory, Faculty of Electrical and Computer Engineering, Shahid Rajaee Teacher Training University (SRTTU), Lavizan 16788, Tehran, Iran
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    DOI: 10.1007/s12200-010-0112-y Cite this Article
    Saeed OLYAEE, Samaneh HAMEDI, Zahra DASHTBAN. Design of electronic sections for nano-displacement measuring system[J]. Frontiers of Optoelectronics, 2010, 3(4): 376 Copy Citation Text show less

    Abstract

    Noncontact displacement measurement is generally based on the interferometry method. In the semiconductor industry, a technique for measuring small features is required as circuit integration becomes denser and the wafer size becomes larger. An interferometric system known as a three-longitudinal-mode heterodyne interferometer (TLMI) is made of two main parts: optical setup and electronic sections. In the optical part, the base and measurement signals having 500-MHz frequency are produced, resulting from interfering three longitudinal modes. The secondary beat frequency to measure the displacement in the TLMI is about 300 kHz. To extract the secondary beat frequency, wide-band amplifiers, doublebalanced mixers (DBMs), band-pass filters (BPFs), and low-pass filters (LPFs) are used. In this paper, we design the integrated circuit of a super-heterodyne interferometer with total gain of 56.9 dB in size of 1030 μm×1030 μm.
    Saeed OLYAEE, Samaneh HAMEDI, Zahra DASHTBAN. Design of electronic sections for nano-displacement measuring system[J]. Frontiers of Optoelectronics, 2010, 3(4): 376
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