• Infrared and Laser Engineering
  • Vol. 44, Issue 2, 747 (2015)
Yan Shubin*, Ma Kezhen, Li Minghui, Guo Zebin, Luo Liang, Zhang Anfu, Wang Renxin, and Xue Chenyang
Author Affiliations
  • [in Chinese]
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    DOI: Cite this Article
    Yan Shubin, Ma Kezhen, Li Minghui, Guo Zebin, Luo Liang, Zhang Anfu, Wang Renxin, Xue Chenyang. Large dimension wedge-resonator on silicon chip for gyro application[J]. Infrared and Laser Engineering, 2015, 44(2): 747 Copy Citation Text show less

    Abstract

    For the problem that core sensitive unit of integrated optic gyro is difficult to realize integration and high sensitivity, a program of fabricating silica wedge-resonator was proposed. Through the theoretical analysis, the ultimate resolution of the gyro caused by the photo-detector shot noise was proportional to the product of the diameter and the quality factor of the resonant cavity. Wedge cavity of 1.5 cm diameter and 22° wedge angle was produced by MEMS(micro-electromechanical systems) process; resonant cavities with different wedge angles were acquired by controlling the mask layer parameters; the relationship between mask layer parameters and wedge angles quality was discussed. Through the coupling test, the quality factor of the resonator is 2×106, the theoretical sensitivity of 6 (°)/h is achieved for the gyroscope based on the resonator fabricated.
    Yan Shubin, Ma Kezhen, Li Minghui, Guo Zebin, Luo Liang, Zhang Anfu, Wang Renxin, Xue Chenyang. Large dimension wedge-resonator on silicon chip for gyro application[J]. Infrared and Laser Engineering, 2015, 44(2): 747
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