• Frontiers of Optoelectronics
  • Vol. 5, Issue 1, 112 (2012)
Yijie HUO1、*, Hai LIN2, Robert CHEN1, Yiwen RONG1, Theodore I. KAMINS1, and James S. HARRIS1
Author Affiliations
  • 1Department of Electrical Engineering, Stanford University, Stanford, California 94305, USA
  • 2Department of Materials Science and Engineering, Stanford University, Stanford, California 94305, USA
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    DOI: 10.1007/s12200-012-0193-x Cite this Article
    Yijie HUO, Hai LIN, Robert CHEN, Yiwen RONG, Theodore I. KAMINS, James S. HARRIS. MBE growth of tensile-strained Ge quantum wells and quantum dots[J]. Frontiers of Optoelectronics, 2012, 5(1): 112 Copy Citation Text show less

    Abstract

    Germanium (Ge) has gained much interest due to the potential of becoming a direct band gap material and an efficient light source for the future complementary metal-oxide-semiconductor (CMOS) compatible photonic integrated circuits. In this paper, highly biaxial tensile strained Ge quantum wells (QWs) and quantum dots (QDs) grown by molecular beam epitaxy are presented. Through relaxed step-graded InGaAs buffer layers with a larger lattice constant, up to 2.3% tensile-strained Ge QWs as well as up to 2.46% tensile-strained Ge QDs are obtained. Characterizations show the good material quality as well as low threading dislocation density. A strong increase of photoluminescence (PL) with highly tensile strained Ge layers at low temperature suggests the existence of a direct band gap semiconductor.
    Yijie HUO, Hai LIN, Robert CHEN, Yiwen RONG, Theodore I. KAMINS, James S. HARRIS. MBE growth of tensile-strained Ge quantum wells and quantum dots[J]. Frontiers of Optoelectronics, 2012, 5(1): 112
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