Research on microlens array for improving the fill factor of CCD image sensors

[in Chinese]; [in Chinese]; [in Chinese]

Journals >Infrared and Laser Engineering >Volume 33 >Issue 2 >Page 209 > Article

Infrared and Laser Engineering
Vol. 33, Issue 2, 209 (2004)

Research on microlens array for improving the fill factor of CCD image sensors

[in Chinese]^1、*, [in Chinese]², and [in Chinese]¹

Author Affiliations

¹[in Chinese]

²[in Chinese]

show less

DOI: Cite this Article

[in Chinese], [in Chinese], [in Chinese]. Research on microlens array for improving the fill factor of CCD image sensors[J]. Infrared and Laser Engineering, 2004, 33(2): 209 Copy Citation Text

show less

Abstract

To improve the detecting sensitivity of CCD image sensors,the design method and the fabrication technology of 516×516 element microlens array on fused silica substrate are introduced briefly. The test data indicate that the microlens array has perfect surface profile,good uniformity and optical performance. Consequently the fill factors of microlens array increase greatly.

Keywords

CCD Fill factor Microlens array Reactive ion etching

[in Chinese], [in Chinese], [in Chinese]. Research on microlens array for improving the fill factor of CCD image sensors[J]. Infrared and Laser Engineering, 2004, 33(2): 209

Download Citation

Tools

Save the article for my favorites

Paper Information