• Chinese Optics Letters
  • Vol. 20, Issue 1, 010502 (2022)
Meng-Qiang Cai1、2, Qiang Wang1, Cheng-Hou Tu1、5、*, Yong-Nan Li1, and Hui-Tian Wang3、4
Author Affiliations
  • 1School of Physics and Key Laboratory of Weak Light Nonlinear Photonics, Nankai University, Tianjin 300071, China
  • 2Institute of Space Science and Technology, Nanchang University, Nanchang 330031, China
  • 3National Laboratory of Solid State Microstructures, Nanjing University, Nanjing 210093, China
  • 4Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing 210093, China
  • 5Collaborative Innovation Center of Light Manipulations and Applications, Shandong Normal University, Jinan 250358, China
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    DOI: 10.3788/COL202220.010502 Cite this Article Set citation alerts
    Meng-Qiang Cai, Qiang Wang, Cheng-Hou Tu, Yong-Nan Li, Hui-Tian Wang. Dynamically taming focal fields of femtosecond lasers for fabricating microstructures[J]. Chinese Optics Letters, 2022, 20(1): 010502 Copy Citation Text show less
    References

    [1] Q. Zhan. Cylindrical vector beams: from mathematical concepts to applications. Adv. Opt. Photon., 1, 1(2009).

    [2] G. J. Gbur. Singular Optics(2016).

    [3] Y. Zhang, J. Shen, C. Min, Y. Jin, Y. Jiang, J. Liu, S. Zhu, Y. Sheng, A. V. Zayats, X. Yuan. Nonlinearity-induced multiplexed optical trapping and manipulation with femtosecond vector beams. Nano Lett., 18, 5538(2018).

    [4] X. Zhang, G. Rui, J. He, Y. Cui, B. Gu. Nonlinear accelerated orbiting motions of optical trapped particles through two-photon absorption. Opt. Lett., 46, 110(2021).

    [5] Y. Kozawa, D. Matsunaga, S. Sato. Superresolution imaging via superoscillation focusing of a radially polarized beam. Optica, 5, 86(2018).

    [6] C. Hnatovsky, V. Shvedov, W. Krolikowski, A. Rode. Revealing local field structure of focused ultrashort pulses. Phys. Rev. Lett., 106, 123901(2011).

    [7] K. Lou, S. X. Qian, Z. C. Ren, C. Tu, Y. Li, H. T. Wang. Femtosecond laser processing by using patterned vector optical fields. Sci. Rep., 3, 2281(2013).

    [8] M. Cai, C. Tu, H. Zhang, S. Qian, K. Lou, Y. Li, H.-T. Wang. Subwavelength multiple focal spots produced by tight focusing the patterned vector optical fields. Opt. Express, 21, 31469(2013).

    [9] T. Jiang, S. Gao, Z. N. Tian, H. Z. Zhang, L. G. Niu. Fabrication of diamond ultra-fine structures by femtosecond laser. Chin. Opt. Lett., 18, 101402(2020).

    [10] J. Dudutis, J. Pipiras, S. Schwarz, S. Rung, R. Hellmann, G. Račiukaitis, P. Gečys. Laser-fabricated axicons challenging the conventional optics in glass processing applications. Opt. Express, 28, 5715(2020).

    [11] K. M. Davis, K. Miura, N. Sugimoto, K. Hirao. Writing waveguides in glass with a femtosecond laser. Opt. Lett., 21, 1729(1996).

    [12] B. W. Wu, C. Wang, Z. Luo, J. H. Li, S. Man, K. W. Ding, J. A. Duan. Controllable annulus micro-/nanostructures on copper fabricated by femtosecond laser with spatial doughnut distribution. Chin. Opt. Lett., 18, 013101(2020).

    [13] A. Ancona, S. Döring, C. Jauregui, F. Röser, J. Limpert, S. Nolte, A. Tünnermann. Femtosecond and picosecond laser drilling of metals at high repetition rates and average powers. Opt. Lett., 34, 3304(2009).

    [14] S. Xu, H. Fan, S.-J. Xu, Z.-Z. Li, Y. Lei, L. Wang, J.-F. Song. High-efficiency fabrication of geometric phase elements by femtosecond-laser direct writing. Nanomaterials, 10, 1737(2020).

    [15] M. K. Bhuyan, F. Courvoisier, P.-A. Lacourt, M. Jacquot, L. Furfaro, M. Withford, J. Dudley. High aspect ratio taper-free microchannel fabrication using femtosecond Bessel beams. Opt. Express, 18, 566(2010).

    [16] X. Li, M. Li, H. J. Liu. Effective strategy to achieve a metal surface with ultralow reflectivity by femtosecond laser fabrication. Chin. Opt. Lett., 19, 051401(2021).

    [17] X. Q. Liu, L. Yu, S. N. Yang, Q.-D. Chen, L. Wang, S. Juodkazis, H.-B. Sun. Optical nanofabrication of concave microlens arrays. Laser Photon. Rev., 13, 1800272(2019).

    [18] H. Fan, X.-W. Cao, L. Wang, Z.-Z. Li, Q.-D. Chen, S. Juodkazis, H.-B. Sun. Control of diameter and numerical aperture of microlens by a single ultra-short laser pulse. Opt. Lett., 44, 5149(2019).

    [19] X. Jia, T. Jia, L. Ding, P. Xiong, L. Deng, Z. Sun, Z. Wang, J. Qiu, Z. Xu. Complex periodic micro/nanostructures on 6h-sic crystal induced by the interference of three femtosecond laser beams. Opt. Lett., 34, 788(2009).

    [20] T. Kondo, S. Matsuo, S. Juodkazis, V. Mizeikis, H. Misawa. Multiphoton fabrication of periodic structures by multibeam interference of femtosecond pulses. Appl. Phys. Lett., 82, 2758(2003).

    [21] S. Hasegawa, Y. Hayasaki. Polarization distribution control of parallel femtosecond pulses with spatial light modulators. Opt. Express, 21, 12987(2013).

    [22] Y. Jin, O. J. Allegre, W. Perrie, K. Abrams, J. Ouyang, E. Fearon, S. P. Edwardson, G. Dearden. Dynamic modulation of spatially structured polarization fields for real-time control of ultrafast laser-material interactions. Opt. Express, 21, 25333(2013).

    [23] R. Drevinskas, J. Zhang, M. Beresna, M. Gecevičius, A. G. Kazanskii, Y. P. Svirko, P. G. Kazansky. Laser material processing with tightly focused cylindrical vector beams. Appl. Phys. Lett., 108, 221107(2016).

    [24] M.-Q. Cai, P.-P. Li, D. Feng, Y. Pan, S.-X. Qian, Y. Li, C. Tu, H.-T. Wang. Microstructures fabricated by dynamically controlled femtosecond patterned vector optical fields. Opt. Lett., 41, 1474(2016).

    [25] H. Lin, B. Jia, M. Gu. Dynamic generation of Debye diffraction-limited multifocal arrays for direct laser printing nanofabrication. Opt. Lett., 36, 406(2011).

    [26] S. Hasegawa, Y. Hayasaki. Holographic femtosecond laser processing with multiplexed phase Fresnel lenses displayed on a liquid crystal spatial light modulator. Opt. Rev., 14, 208(2007).

    [27] Y. Hayasaki, T. Sugimoto, A. Takita, N. Nishida. Variable holographic femtosecond laser processing by use of a spatial light modulator. Appl. Phys. Lett., 87, 031101(2005).

    [28] J. Ni, C. Wang, C. Zhang, Y. Hu, L. Yang, Z. Lao, B. Xu, J. Li, D. Wu, J. Chu. Three-dimensional chiral microstructures fabricated by structured optical vortices in isotropic material. Light Sci. Appl., 6, e17011(2017).

    [29] B. Sun, P. S. Salter, C. Roider, A. Jesacher, J. Strauss, J. Heberle, M. Schmidt, M. J. Booth. Four-dimensional light shaping: manipulating ultrafast spatiotemporal foci in space and time. Light Sci. Appl., 7, 17117(2018).

    [30] X.-L. Wang, J. Ding, W.-J. Ni, C.-S. Guo, H.-T. Wang. Generation of arbitrary vector beams with a spatial light modulator and a common path interferometric arrangement. Opt. Lett., 32, 3549(2007).

    Data from CrossRef

    [1] 马云聪 Ma Yuncong, 梁兆恒 Liang Zhaoheng, 凌琳 Ling Lin, 郭元锴 Guo Yuankai, 李子豪 Li Zihao, 韦小明 Wei Xiaoming, 杨中民 Yang Zhongmin. 智能调控多维激光技术与应用. Chinese Journal of Lasers, 50, 1101004(2023).

    Meng-Qiang Cai, Qiang Wang, Cheng-Hou Tu, Yong-Nan Li, Hui-Tian Wang. Dynamically taming focal fields of femtosecond lasers for fabricating microstructures[J]. Chinese Optics Letters, 2022, 20(1): 010502
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