• Chinese Optics Letters
  • Vol. 20, Issue 1, 010502 (2022)
Meng-Qiang Cai1、2, Qiang Wang1, Cheng-Hou Tu1、5、*, Yong-Nan Li1, and Hui-Tian Wang3、4
Author Affiliations
  • 1School of Physics and Key Laboratory of Weak Light Nonlinear Photonics, Nankai University, Tianjin 300071, China
  • 2Institute of Space Science and Technology, Nanchang University, Nanchang 330031, China
  • 3National Laboratory of Solid State Microstructures, Nanjing University, Nanjing 210093, China
  • 4Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing 210093, China
  • 5Collaborative Innovation Center of Light Manipulations and Applications, Shandong Normal University, Jinan 250358, China
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    Micromachining based on femtosecond lasers usually requires accurate control of the sample movement, which may be very complex and costly. Therefore, the exploration of micromachining without sample movement is valuable. Herein, we have illustrated the manipulation of optical fields by controlling the polarization or phase to vary periodically and then realized certain focal traces by real-time loading of the computer-generated holograms (CGHs) on the spatial light modulator. The focal trace is composed of many discrete focal spots, which are generated experimentally by using the real-time dynamically controlled CGHs. With the designed focal traces, various microstructures such as an ellipse, a Chinese character “Nan”, and an irregular quadrilateral grid structure are fabricated in the z-cut LiNbO3 wafers, showing good qualities in terms of continuity and homogeneity. Our method proposes a movement free solution for micromachining samples and completely abandons the high precision stage and complex movement control, making microstructure fabrication more flexible, stable, and cheaper.
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    Meng-Qiang Cai, Qiang Wang, Cheng-Hou Tu, Yong-Nan Li, Hui-Tian Wang. Dynamically taming focal fields of femtosecond lasers for fabricating microstructures[J]. Chinese Optics Letters, 2022, 20(1): 010502
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    Category: Diffraction, Gratings, and Holography
    Received: May. 28, 2021
    Accepted: Aug. 2, 2021
    Published Online: Oct. 12, 2021
    The Author Email: Cheng-Hou Tu (tuchenghou@nankai.edu.cn)