• Chinese Optics Letters
  • Vol. 20, Issue 2, 022502 (2022)
Fan Yang1、2, Xiansong Fang1、2, Xinyu Chen1、2, Lixin Zhu1, Fan Zhang1、2, Zhangyuan Chen1、2, and Yanping Li1、2、*
Author Affiliations
  • 1State Key Laboratory of Advanced Optical Communication Systems and Networks, Department of Electronics, Peking University, Beijing 100871, China
  • 2Frontiers Science Center for Nano-optoelectronics, Peking University, Beijing 100871, China
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    DOI: 10.3788/COL202220.022502 Cite this Article Set citation alerts
    Fan Yang, Xiansong Fang, Xinyu Chen, Lixin Zhu, Fan Zhang, Zhangyuan Chen, Yanping Li. Monolithic thin film lithium niobate electro-optic modulator with over 110 GHz bandwidth[J]. Chinese Optics Letters, 2022, 20(2): 022502 Copy Citation Text show less

    Abstract

    High-performance thin film lithium niobate (LN) electro-optic modulators with low cost are in demand. Based on photolithography and wet etching, we experimentally demonstrate a thin film LN Mach–Zehnder modulator with a 3 dB bandwidth exceeding 110 GHz, which shows the potential of boosting the throughput and reducing cost. The fabricated modulator also exhibits a comparable low half-wave voltage-length product of 2.37 V·cm, a high extinction ratio of >23 dB, and the propagation loss of optical waveguides of 0.2 dB/cm. Besides, six-level pulse amplitude modulation up to 250 Gb/s is successfully achieved.
    Fan Yang, Xiansong Fang, Xinyu Chen, Lixin Zhu, Fan Zhang, Zhangyuan Chen, Yanping Li. Monolithic thin film lithium niobate electro-optic modulator with over 110 GHz bandwidth[J]. Chinese Optics Letters, 2022, 20(2): 022502
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