• Chinese Optics Letters
  • Vol. 20, Issue 11, 113602 (2022)
Chunyan Jin1, Wei Wu1、*, Lei Cao1, Bofeng Gao1, Jiaxin Chen2, Wei Cai1、**, Mengxin Ren1、3、***, and Jingjun Xu1、****
Author Affiliations
  • 1Key Laboratory of Weak-Light Nonlinear Photonics, Ministry of Education, School of Physics and TEDA Applied Physics Institute, Nankai University, Tianjin 300071, China
  • 2Science and Technology on Electro-Optical Information Security Control Laboratory, Tianjin 300308, China
  • 3Collaborative Innovation Center of Extreme Optics, Shanxi University, Taiyuan 030006, China
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    DOI: 10.3788/COL202220.113602 Cite this Article Set citation alerts
    Chunyan Jin, Wei Wu, Lei Cao, Bofeng Gao, Jiaxin Chen, Wei Cai, Mengxin Ren, Jingjun Xu. Fabrication of lithium niobate metasurfaces via a combination of FIB and ICP-RIE[J]. Chinese Optics Letters, 2022, 20(11): 113602 Copy Citation Text show less

    Abstract

    Lithium niobate (LN) metasurfaces have emerged as a new platform for manipulating electromagnetic waves. Here, we report a fabrication technique for LN nano-grating metasurfaces by combining focused ion beam (FIB) milling with inductively coupled plasma reactive ion etching (ICP-RIE). Steep sidewalls with angles larger than 80° are achieved. Sharp quasi-bound states in the continuum are observed from our metasurfaces. The measured transmission spectra show good agreement with the numerical simulations, confirming the high quality of the fabricated metasurfaces. Our technique can be applied to fabricate the LN metasurfaces with sharp resonances for various applications in optical communications, on-chip photonics, laser physics, sensing, and so on.
    Chunyan Jin, Wei Wu, Lei Cao, Bofeng Gao, Jiaxin Chen, Wei Cai, Mengxin Ren, Jingjun Xu. Fabrication of lithium niobate metasurfaces via a combination of FIB and ICP-RIE[J]. Chinese Optics Letters, 2022, 20(11): 113602
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