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PhotoniX
Vol. 2, Issue 1, 4 (2021)

Ultra-short-pulse high-average-power megahertz-repetition-rate coherent extreme-ultraviolet light source

Robert Klas^1,2,*, Alexander Kirsche^1,2, Martin Gebhardt^1,2, Joachim Buldt¹..., Henning Stark¹, Steffen Hädrich³, Jan Rothhardt^1,2,4 and Jens Limpert^1,2,4|Show fewer author(s)

Author Affiliations

¹Institute of Applied Physics, Abbe Center of Photonics, Friedrich-Schiller-University Jena, Albert-Einstein-Str. 15, 07745 Jena, Germany

²Helmholtz-Institute Jena, Fröbelstieg 3, 07743 Jena, Germany

³Active Fiber Systems GmbH, Ernst-Ruska-Ring 17, 07745 Jena, Germany

⁴Fraunhofer Institute for Applied Optics and Precision Engineering, Albert-Einstein-Str. 7, 07745 Jena, Germany

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DOI: 10.1186/s43074-021-00028-y Cite this Article

Robert Klas, Alexander Kirsche, Martin Gebhardt, Joachim Buldt, Henning Stark, Steffen Hädrich, Jan Rothhardt, Jens Limpert. Ultra-short-pulse high-average-power megahertz-repetition-rate coherent extreme-ultraviolet light source[J]. PhotoniX, 2021, 2(1): 4 Copy Citation Text

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References

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Robert Klas, Alexander Kirsche, Martin Gebhardt, Joachim Buldt, Henning Stark, Steffen Hädrich, Jan Rothhardt, Jens Limpert. Ultra-short-pulse high-average-power megahertz-repetition-rate coherent extreme-ultraviolet light source[J]. PhotoniX, 2021, 2(1): 4

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