Urban land use efficiency is an important factor affecting the process of urbanization. Improving urban land use efficiency is of great significance for promoting coordinated regional development. However, how to differentially improve urban land use efficiency of different regions remains to be studied. Based on the theory of production factors, this study first analyzed the mechanism of the impact of urban production factor input on urban land use efficiency, and then used the data of 30 provinces (municipalities, autonomous regions) in China from 1996 to 2017 to empirically analyze the effect of capital, labor, and innovation input on urban land use efficiency, to explore the effects of differentiation in various stages of industrialization. The results show that: (1) The regression results of all samples indicate that capital input, labor input, and innovation input have a significant positive effect on urban land use efficiency. (2) The heterogeneous regression results of different industrialization stages indicate that in the early stage of industrialization, capital and labor inputs can significantly promote the improvement of urban land use efficiency; in the middle stage of industrialization, capital, labor, and innovation inputs can all significantly improved urban land use efficiency; in the later stage of industrialization, the impact of capital input on urban land use efficiency is negative, while the impact of labor and innovation inputs on urban land use efficiency is significantly positive. Therefore, at different stages of industrialization, the factors that affect the efficiency of urban land use and their intensity and direction are different. It is necessary to formulate differentiated policies to promote the improvement of urban land use efficiency in different industrialization stages.