Facility agriculture is a symbol of agricultural modernization and an important way to improve the quality and efficiency of agricultural products and production. As the leader and innovator of modern agriculture, large-scale farmers can greatly promote the development of facility agriculture. Using Probit and Tobit models, this study analyzed the development status of facility agriculture of specialized households and family farms based on the data of the second phase of the “national new agricultural management entities development index survey.” The results show that: The proportion of these two types of farmers operating facility agriculture is low, their planting scale is small, the types of products are diversified, and the main products are vegetables. The operation of facility agriculture is restricted by capital and technology, and the overall benefit is not high. In addition, the development of facility agriculture is significantly affected by the characteristics of household heads, family characteristics, external environment, among other factors. On the whole, the richer the household head’s human capital is, the more beneficial it is to the development of facility agriculture. The influence of family characteristics on different types of farmers is inconsistent. External environment plays a significant role in promoting the development of facility agriculture. Industrial agglomeration is an important direction for facility agriculture to grow and become stronger and for realizing agricultural modernization. Therefore, in order to further promote the development of facility agriculture of family farms and specialized households, the government also needs to support them in terms of policy, capital, technical support, and market development.