We study superconducting properties of NbN thin film samples with different thicknesses and an ultra-thin NbTiN meander nanowire sample. For the ultra-thin samples, we found that the temperature dependence of upper critical field (Hc2) in parallel to surface orientation shows bending curvature close to critical temperature Tc, suggesting a two-dimensional (2D) nature of the samples. The 2D behavior is further supported by the angular dependence measurements of Hc2 for the thinnest samples. The temperature dependence of parallel upper critical field for the thick films could be described by a model based on the anisotropic Ginzburg–Landau theory. Interestingly, the results measured in the field perpendicular to the film surface orientation show a similar bending curvature but in a much narrow temperature region close to Tc for the ultra-thin samples. We suggest that this feature could be due to suppression of pair-breaking caused by local in-homogeneity. We further propose the temperature dependence of perpendicular Hc2 as a measure of uniformity of superconducting ultra-thin films. For the thick samples, we find that Hc2 shows maxima for both parallel and perpendicular orientations. The Hc2 peak for the perpendicular orientation is believed to be due to the columnar structure formed during the growth of the thick films. The presence of columnar structure is confirmed by transmission electron microscopy (TEM). In addition, we have measured the angular dependence of magneto-resistance, and the results are consistent with the Hc2 data.