Gengyun Wang, Lili Xie, Hongbo Bu. Design Method of Pixel Modulation Transfer Function and Signal-to-Noise Ratio for CMOS Image Sensor[J]. Laser & Optoelectronics Progress, 2021, 58(20): 2011002
- Laser & Optoelectronics Progress
- Vol. 58, Issue 20, 2011002 (2021)
Fig. 1. MTF distribution of CMOS image sensor with different shape sensitivity apertures. (a) Rhomb-shaped active area; (b) hexagon-shaped active area; (c) circular-shaped active area; (d) rectangular-shaped active area
Fig. 2. Aperture MTF of CMOS detector. (a) Sensitivity profile of pixel; (b) 3D distribution of aperture MTF; (c) 2D distribution of aperture MTF
Fig. 3. Light absorption coefficient of silicon material varies with wavelength
Fig. 4. Pixel structure of P-type substrate superimposed P-type epitaxial layer in CMOS process and diffusion MTF. (a) Pixel structure; (b) diffusion MTF increases with the decrease of incident light wavelength
Fig. 5. QE and SNR with the change of the input wavelength. (a) QE line; (b) SNR lines
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Table 1. MTF and SNR of 8-μm pixel structures
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