Diamond-like carbon(DLC) films were deposited on a silicon chip substrate by a metal pulsed magnetic filtered cathodic vacuum arc deposition technique, a direct current magnetron sputtering technique and a pulsed glow discharge plasma enhanced chemical vapor deposition technique. And the characteristics of DLC films were investigated using laser Raman spectroscopy and X-ray photoelectron spectroscopy. The spectra of diamond like carbon were collected using Raman spectrometers with 325 nm flters. It was found that DLC films prepared by various deposition technique have different G-peak, D-peak, T-peak, the full width at half maximum(FWHM)of G-peak, D-peak and T-peak, the intensity ratio I(D)/I(G) and I(T)/I(G) and the sp3 content. Among them, the films grown by metal pulsed magnetic filtered cathodic vacuum arc deposition technique have the largest G-peak wave number and the intensity ratio I(T)/I(G), the minimum of the intensity ratio I(D)/I(G), G-FWHM and the maximum sp3 content； those grown by the direct current magnetron sputtering technique have the 2nd largest G-peak wave number, the intensity ratio I(D)/I(G) and I(T)/I(G) and sp3 content, however, they have the largest G-FWHM, while those grown by the pulsed glow discharge plasma enhanced chemical vapor deposition technique have the minimum G-peak wave number and the intensity ratio I(T)/I(G) and sp3 content, and the maximum intensity ratio I(D)/I(G).