• PhotoniX
  • Vol. 3, Issue 1, 25 (2022)
Minfei He1, Zhimin Zhang2, Chun Cao2, Yiwei Qiu2, Xiaoming Shen2, Guozun Zhou1, Zixin Cai1, Xinjie Sun1, Xin He1, Liang Xu1, Xi Liu2, Chenliang Ding2, Yaoyu Cao3, Cuifang Kuang1、2、4、5、*, and Xu Liu1、2、4、**
Author Affiliations
  • 1State Key Laboratory of Modern Optical Instrumentation, College of Optical Science and Engineering, Zhejiang University, Hangzhou, 310027 Zhejiang, China
  • 2Research Center for Intelligent Chips and Devices, Zhejiang Lab, Hangzhou 311121, China
  • 3Guangdong Provincial Key Laboratory of Optical Fiber Sensing and Communications, Institute of Photonics Technology, Jinan University, Guangzhou, 510000 Guangdong, China
  • 4Collaborative Innovation Center of Extreme Optics, Shanxi University, Taiyuan, 030006 Shanxi, China
  • 5Ningbo Research Institute, Zhejiang University, Ningbo 315100, China
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    DOI: 10.1186/s43074-022-00072-2 Cite this Article
    Minfei He, Zhimin Zhang, Chun Cao, Yiwei Qiu, Xiaoming Shen, Guozun Zhou, Zixin Cai, Xinjie Sun, Xin He, Liang Xu, Xi Liu, Chenliang Ding, Yaoyu Cao, Cuifang Kuang, Xu Liu. Single-color peripheral photoinhibition lithography of nanophotonic structures[J]. PhotoniX, 2022, 3(1): 25 Copy Citation Text show less

    Abstract

    Advances in direct laser writing to attain super-resolution are required to improve fabrication performance and develop potential applications for nanophotonics. In this study, a novel technique using single-color peripheral photoinhibition lithography was developed to improve the resolution of direct laser writing while preventing the chromatic aberration characteristics of conventional multicolor photoinhibition lithography, thus offering a robust tool for fabricating 2D and 3D nanophotonic structures. A minimal feature size of 36 nm and a resolution of 140 nm were achieved with a writing speed that was at least 10 times faster than existing photoinhibition lithography. Super-resolution and fast scanning enable the fabrication of spin-decoupled metasurfaces in the visible range within a printing duration of a few minutes. Finally, a subwavelength photonic crystal with a near-ultraviolet structural color was fabricated to demonstrate the potential of 3D printing. This technique is a flexible and reliable tool for fabricating ultracompact optical devices.
    Minfei He, Zhimin Zhang, Chun Cao, Yiwei Qiu, Xiaoming Shen, Guozun Zhou, Zixin Cai, Xinjie Sun, Xin He, Liang Xu, Xi Liu, Chenliang Ding, Yaoyu Cao, Cuifang Kuang, Xu Liu. Single-color peripheral photoinhibition lithography of nanophotonic structures[J]. PhotoniX, 2022, 3(1): 25
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